description: Primary beam ion; +20 keV Cs-,
Gold coat thickness; 65 nm,
Secondary accelerating voltage; -10 kV,
Primary beam current; 200 pA,
Primary beam rastering; 5x5 um (7x7 um for first 140s),
Energy offset; -45 eV,
Contrast aperture diameter; 40 um
Entrance slit width; 80 um
Field aperture dimension; 800x800 um (20x20 um on sample)